PECVD

http://dbpedia.org/resource/PECVD

rdfs:label

rdf:langString PECVD

dbpedia-owl:wikiPageID

xsd:integer 3189927

dbpedia-owl:wikiPageRevisionID

xsd:integer 102718984

dbpedia-owl:wikiPageLength

xsd:nonNegativeInteger 55

dbpedia-owl:wikiPageWikiLink

dbpedia:Plasma-enhanced_chemical_vapor_deposition

dbpedia-owl:wikiPageRedirects

dbpedia:Plasma-enhanced_chemical_vapor_deposition

prov:wasDerivedFrom

<http://en.wikipedia.org/wiki/PECVD?oldid=102718984&ns=0>

foaf:isPrimaryTopicOf

<http://en.wikipedia.org/wiki/PECVD>

data from the linked data cloud