Mask inspection
http://dbpedia.org/resource/Mask_inspection an entity of type: MilitaryConflict
In microtechnology, mask inspection or photomask inspection is an operation of checking the correctness of the fabricated photomasks, used, e.g., for semiconductor device fabrication. Modern technologies for locating defects in photomasks are automated systems that involve scanning electron microscopy and other advanced tools.
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在微技術領域中,光罩檢測(英語:mask inspection)是檢查光罩製作正確性的操作技術。用於定位光罩缺陷的是高級自動化系統,如掃描電子顯微鏡等。「光罩檢測」一詞也可能非正式地指稱真正寫入光罩前的光罩資料檢測(mask data inspection)。
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Mask inspection
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光罩檢測
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24988101
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787253363
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In microtechnology, mask inspection or photomask inspection is an operation of checking the correctness of the fabricated photomasks, used, e.g., for semiconductor device fabrication. Modern technologies for locating defects in photomasks are automated systems that involve scanning electron microscopy and other advanced tools.
rdf:langString
在微技術領域中,光罩檢測(英語:mask inspection)是檢查光罩製作正確性的操作技術。用於定位光罩缺陷的是高級自動化系統,如掃描電子顯微鏡等。「光罩檢測」一詞也可能非正式地指稱真正寫入光罩前的光罩資料檢測(mask data inspection)。
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1554